INTRODUCTION
SENSORS
MEMS
1 Introduction
2 Technologies
3 Structures
4 Effects
5 Measuring parameters
6 Application
4.1 Thermal effects
4.2 Mechanical
4.3 Magnetic
4.4 Radiation
4.5 Selective molecular receptors
4.6 Adsorption to permeation
4.7 Interactions I.
4.8 Interactions II.
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4 - Effects
4.4 - Radiation effects
Optical effects
Nuclear effects
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