• INTRODUCTION
• SENSORS
• MEMS

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• 1 Introduction
• 2 Technologies
• 3 Structures
• 4 Effects
• 5 Measuring parameters
• 6 Application

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• 3.1 Impedance types
• 3.2 Semiconductor devices
• 3.3 Sensors based on acoustic-wave propagation
• 3.4 Calorimetric sensors
• 3.5 Electrochemical cells
• 3.6 Sensors with optical waveguides